DE102014201438A1 - Device and method for mounting a detection device for detecting properties of a measurement object - Google Patents

Abstract

The invention relates to a device for holding a detection device for detecting properties of a measurement object on a carrier device (11), the device having at least one carrier attachment section (10) for fastening the device to the carrier device (11), the device comprising at least one sensor attachment section (11). 9, 9a, 9b) for fastening the device to the detection device, wherein the device comprises at least one spring element, wherein the spring element is arranged and / or formed such that the at least one support attachment portion (10) relative to at least one sensor attachment portion (9, 9a, 9b) is movable at least in or against a relative direction of movement, and an arrangement (1) comprising a carrier system and a detection device.

Description

The invention relates to a method and a device for holding a detection device for detecting properties of a measurement object on a carrier device. Furthermore, the invention relates to an arrangement of the detection device and the proposed device.

Roughness sensors which are used to detect a roughness and / or a profile of a surface of a measurement object are known from the prior art.

The DE 20 2008 011 629 U1 describes a roughness and / or profile measuring device with a probe with a sensing lever, which has a stylus with a stylus tip for detecting microscopic surface profiles of workpieces. The device comprises a drive device, by means of which the stylus is movable along the surface profile of a workpiece. Further disclosed is a slide carrying the probe. Further described is a runner of the probe, which touches a reference plane. The document discloses a drive device which has a motor which drives the carriage by means of a spindle. Alternatively, it is disclosed that the drive device comprises a cable or belt drive with a drive cable or drive belt, on which the probe or the carriage carrying the probe is attached.

Next is known the DE 20 2013 102 043 U1 , This also discloses a roughness or surface microstructure profile measuring device for measuring the roughness or a surface microstructure profile of a measurement object surface of a measurement object. Herein, the stylus is pulled by a motor over the workpiece surface, wherein the motor pushes a movable part, for example via a spindle, a cable, a belt or the like.

Also the DE 20 2013 102 045 U1 discloses a roughness or surface microstructure profile measuring device designed in this way.

Next is known the DE 10 2006 011 904 A1 This document discloses a measuring system for measuring a workpiece surface on a workpiece with at least one measuring probe which can be moved to the workpiece, wherein the measuring probe has a probe body and at least one measuring sensor attached to the probe body. Further disclosed is a support device associated with the measuring sensor with at least one, with the aid of a Zustellantriebs deliverable towards the workpiece surface, supporting member for fixing the probe body to the workpiece in a measuring position by supporting the probe body on the workpiece surface. This document also discloses that a stylus tip is moved over a desired measuring path with the aid of a sensor drive and a roughness profile is recorded.

The DE 10 2006 050 838 A1 discloses a measuring system for measuring a workpiece surface on a workpiece having at least one probe to be moved to the workpiece, having a probe body and at least one probe attached to the probe body, wherein at least one probe is an optical probe and means for filling a gap between the probe and the workpiece surface to be measured is provided in the measuring area with a liquid transparent to measuring radiation.

The DE 10 2009 035 747 A1 discloses a roughness and / or profile measuring device with a probe with a feeler lever, which has a stylus with a stylus tip for detecting or measuring microscopic surface profiles of workpieces. Further disclosed is a, preferably designed as a feed device, drive device by means of which the wand is movable along the surface profile of a workpiece. In this case, the drive device may comprise a drive cable or a drive belt, on which the probe or the carriage carrying the probe is attached. Alternatively, the drive device has a motor which drives the carriage by means of a spindle.

Roughness sensors are usually deposited on a surface of a workpiece to be detected, after settling a movable part, e.g. with a probe element, along a measuring path along the surface is moved. Because of the high sensitivity of roughness sensors, it is desirable to perform the settling such that a desired sensing force is set in a desired position and / or orientation, but the sensor is not damaged.

Coordinate measuring devices which detect, for example, tactile coordinates of a workpiece by means of a probe element are also known. That's how it describes DE 10 2008 038 599 A1 a sensor joint for rotating a sensor, wherein the sensor joint has a part rotatable about a rotation axis, with which the sensor is connectable or connected. Furthermore, the sensor joint has a fixed part, to which the rotatable part is rotatable relative to the axis of rotation. Further, the document discloses sensors that mechanically probe objects to be measured and sensors that act as optical sensors are formed, which scan, for example, by means of electromagnetic radiation surfaces or generate invasive measurement radiation that penetrate into the measurement object. Further, the document discloses capacitive sensors.

The DE 101 31 160 A1 discloses a method of operating a coordinate measuring machine with a rotary-pivot joint. The rotary-pivot joint has a probe changing device which serves to receive a receiving plate with a stylus, by means of which the workpiece is touched. However, no details of the recording plate are disclosed.

The DE 10 2010 018 250 A1 discloses a method for coordinate measurement on workpieces on a coordinate measuring machine with a probe that includes a probe and a push button associated with the probe. The document further discloses an acceleration sensor, which may be formed as a spring-mass system, wherein the deflection during acceleration between a spring-suspended part and a fixed reference electrode, a change in an electrical capacitance can be measured. The detection of the acceleration is used to minimize Fehlantastungen.

Next is known the DE 10 2010 054 973 A1 , which discloses a method for measuring a measuring object. In this case, a sensor is fed to the measurement object and an entity of the measurement object is touched. At one end of a sleeve, a sensor is arranged, which may have, for example, a key and at the end of a probe. Further, a sensor with rotary-swivel functionality is disclosed.

The technical problem arises of providing a device and a method for holding a detection device for detecting properties of a measurement object on a carrier device and an arrangement of a detection device and such a device for mounting, which provides for improved settling of the detection device on a surface of the measurement object enable.

The solution of the technical problem results from the objects with the features of claims 1, 10 and 14. Further advantageous embodiments of the invention will become apparent from the dependent claims.

It is a basic idea of the invention to provide a holder which comprises at least one spring element, wherein this holding arrangement allows a cushioned settling of the detection device on the surface to be detected.

Proposed is a device for holding a detection device to a carrier device. Thus, the proposed device is used for attachment or suspension of the detection device to the carrier device.

The detection device is a device for detecting properties of a measurement object, in particular of properties of a surface of the measurement object. The measurement object can also be referred to as a test specimen. The detection device can also be referred to as a sensor and can be any device by means of which measurement signals can be generated. Thus, the detection device may comprise at least one measurement signal generator.

Preferably, the detection device is a device for detecting a roughness and / or a profile of the surface of the measurement object (roughness sensor).

The detection device may have a settling direction and / or a scanning direction. The settling direction describes a direction in which the detection device, in particular a support element of the detection device, is to be deposited on the measurement object. The settling direction may, for example, describe a direction in a reference coordinate system of the detection device, which is to be aligned relative to the measurement object, in particular relative to a surface of the measurement object, to a desired direction or direction from a predetermined directional interval in order to detect the characteristics by the To allow detection device. For example, the settling direction may be set such that a vertical symmetry axis of the detection device is oriented orthogonal to at least a portion of a surface of the measurement object when the detection device is deposited on the at least one portion of the measurement object with the predetermined offset direction. The settling direction can also be determined as a function of a desired orientation of the detection device placed on the measurement object, in particular a desired orientation of a support element or a feeler element of the detection device, relative to the measurement object.

The probe direction describes a direction in which the detection device, in particular a probe element of the detection device, is to be aligned relative to the measurement object. The probe direction may e.g. Describe a direction in a reference coordinate system of the detection device, which is to be aligned relative to the measurement object, in particular relative to a surface of the measurement object, in a desired direction or direction from a predetermined directional interval to allow the detection of the properties by the detection device. For example, the scanning direction may be set such that a scanning direction of the detection device, in particular a scanning direction of a sensing element of a detection device is oriented orthogonal to at least a portion of a surface of the measurement object, if the detection device with the predetermined Antastausrichtung relative to the at least a portion of the surface of the Target is aligned. The probing direction can also be determined as a function of a desired orientation of the detection device, in particular a desired alignment of a probe element of the detection device, relative to the measurement object.

In particular, settling direction and scanning direction can be oriented the same.

In particular, the detection device can be a device for contact-contacting the surface of the measurement object. For this purpose, the detection device may comprise at least one probe element, for example a probe element formed with a probe tip. In this case, for example, the probing direction can be oriented parallel to a central center line, for example a central axis of symmetry, of a section of the probe element forming the probe tip.

The detection device can also serve for non-contact, in particular optical, probing of the surface of the measurement object. In this case, the probing direction may be oriented along a central beam direction of a light source of an optical sensor and / or along a central detection direction of an optical detector of the optical sensor.

The detection device can also include a capacitive sensor for detecting the surface of the measurement object. In this case, the probing direction may be oriented parallel to a main direction of an electric field generated by the capacitive sensor.

If there are several possible settling or touching directions of the detection device, then the settling or scanning direction can be a reference response or reference offset direction. For example, For example, in the reference settling direction or reference-sensing direction, a direction with which optimum detection of the characteristics of the measuring object by the sensor is possible. Thus, the reference-butt or reference-offset direction may be a predetermined direction depending on detector specifications. Also, the Referenzantast- or Referenzabsetzrichtung can be a predetermined direction of an interval of possible directions, in particular a central or middle direction of such an interval.

The device has at least one carrier attachment section for attaching the device to the carrier device. In this case, the carrier attachment portion may comprise at least one attachment means for securing the device to the carrier device, wherein the carrier device has, for example, a corresponding attachment means. The carrier attachment portion may preferably be releasably secured to the support means. Here, different types of connection are conceivable, in particular an at least partially positive connection, at least partially non-positive connection. Preferably, the proposed device is screwed in the region of the carrier attachment portion with the support means.

Furthermore, the device has at least one sensor fastening section for fastening the device to the detection device or for fastening the detection device to the device. With respect to the sensor attachment portion and the attachment of the device to the detection device, reference is made to the above statements made to the support mounting portion.

According to the invention, the device has at least one spring element. The spring element is arranged and / or formed such that the at least one carrier attachment portion is movable relative to the at least one sensor attachment portion at least in or against a relative direction of movement. In this case, the relative movement can take place counter to a spring force generated by the at least one spring element. The direction of relative movement can also be described as a jounce or rebound direction.

Thus, therefore, a device for holding is described, which has a carrier attachment portion and a sensor attachment portion and a spring element, wherein the spring element is arranged and / or formed such that the carrier attachment portion is movable relative to the sensor attachment portion at least in or against a relative direction of movement.

This results in an advantageous manner that in the direction of relative movement a cushioned settling and / or probing of the measurement object is possible.

In a preferred embodiment, the direction of relative movement is oriented parallel to the previously described settling direction and / or the scanning direction of a detection device to be fastened to the sensor attachment section.

For example, the sensor attachment portion may be formed and / or arranged such that a deposition direction and / or an anti-direction of a detection device attached or to be fastened to the sensor attachment portion is parallel to the relative movement direction.

By the sensor attachment portion, in particular by the formation of the sensor attachment portion, an orientation of a to be fastened to the sensor attachment portion or detection means relative to the device, in particular relative to the sensor attachment portion, be determined. This means that a detection device with only a predetermined orientation relative to the proposed device, in particular relative to the sensor attachment portion, can be attached thereto. Thus, an orientation of a detection device attached to or fastened to the device relative to the proposed device, in particular relative to the sensor attachment section, can be determined by the sensor attachment section such that the deployment direction and / or the probe direction of a detection device attached or to be fastened to the sensor attachment section are parallel to the relative movement direction is.

Of course, the spring element can also be arranged and / or formed such that a relative movement between the carrier attachment portion and the sensor attachment portion in other, different from the probe direction, directions is possible.

In particular, the sensor attachment portion may be arranged and / or formed such that the detection device can be attached to the proposed device, in particular exclusively in such a way that the relative movement direction is oriented parallel to the scanning direction of the detection device.

By the proposed device results in an advantageous manner that the detection device can be fixed spring-mounted at least in or against its settling and / or Antastrichtung on the support means. This allows e.g. advantageously placing the detection device on a surface of the measurement object with a higher positioning and / or orientation tolerance, since deviation from an ideal positioning and / or orientation, in the e.g. the detection device touches the surface powerless or almost powerless, can be compensated by the relative movement.

Further, the proposed device allows the detection device to be deposited on the surface with a desired settling and / or probing force. Here, the settling force refers to a force acting in the deposition direction, which is exerted by the detection device, for example via at least one support element of the detection device on the surface of the measurement object when the detection device by the support means in a desired Absetzposition and / or with a desired Absetzorientierung on the DUT is discontinued or arranged.

Accordingly, the probing force denotes a force acting in the ant scanning direction, which is exerted by the detection device, for example a sensing element of the detection device on the surface of the measurement object when the detection means positioned by the support means in a desired detection position and / or with a desired Antastorientierung relative to the surface is. The settling or contact force can be provided here at least partially, preferably completely, by a spring force of the at least one spring element. This spring force can be generated, for example, if the spring element is compressed in the desired position and / or orientation of the detection device. The settling and / or probing force can in this case be dependent in particular on a deflection of the spring element. A deflection in this case denotes a relative translational movement or relative rotational movement between ends of the spring element.

The settling force can be equal to the probing force.

In a further embodiment, the device comprises a device for detecting a settling and / or probing force. In this case, the device can generate an electrical signal which represents a settling and / or probing force, in particular a direction and a magnitude of the settling and / or probing force. The device can be designed, for example, as a force sensor. Alternatively, however, the device may also comprise a (angular) position sensor, wherein by means of the (angular) position sensor, a relative translational movement or relative rotational movement between ends of the spring element can be detected. This relative translational or rotational movement can also be described as deflection or rebound. In this case, the device may further comprise an evaluation device which determines the spring force as a function of the relative translational movement or relative rotational movement and properties of the spring element, in particular a spring constant (movement-dependent detection of the settling and / or probing force). Depending on this spring force, in turn, the settling and / or probing force can be determined.

In this case, the device can be connected to other devices by signal and / or data technology. For this purpose, the device may have, for example, suitable interfaces. Thus, the settling and / or probing force or a signal, in dependence of which the settling and / or probing force can be determined, are transmitted to internal evaluation devices.

For example, depending on the settling and / or probing force, a position and / or orientation of the carrier device can be set, in particular regulated.

This advantageously results in that the detection device can be set down on the surface of the test object with a settling and / or probing force that is set as precisely as possible.

In a further embodiment, the device for detecting a settling and / or probing force comprises a device for detecting a deflection in or against the direction of relative movement. The deflection designates here a relative translation movement between ends of the spring element. The motion-dependent detection of the settling and / or probing force has already been described above. This results in an advantageous manner as simple as possible detection of settling and / or probing force.

In a further embodiment, the device comprises at least one connecting section, wherein the carrier mounting section and the sensor mounting section are connected via the connecting section, in particular mechanically. The connecting portion may also be referred to as a connecting element.

The connecting section may extend in an initial state of the connecting section orthogonal to the direction of relative movement, in particular to the scanning direction. The initial state is present in particular when the at least one spring element is in a starting position, that is, it is not spring-loaded or rebounded. Thus, the initial state is especially if a detection device is attached to the proposed device, but no settling and / or probing force is generated. In this case, the at least one spring element may be designed, in particular biased, such that the orthogonal orientation of the connection section relative to the direction of relative movement also results in a weight force exerted by the detection device on the proposed device. The initial state of the at least one spring element can thus designate a prestressed state or a non-prestressed state.

The connecting portion has at least one torsion spring portion. In this case, the at least one spring element may e.g. be designed as a torsion spring element or Torsionsfederelement. The torsion spring section in this case has an axis of rotation. For example, For example, opposite ends of the torsion spring portion may be rotatable relative to each other about the axis of rotation.

The axis of rotation is orthogonal to the direction of relative movement, in particular to the settling and / or Antastrichtung oriented. Also, the axis of rotation may be oriented orthogonal to a plane in which a straight line defined by the direction of relative movement and a central centerline, e.g. a central axis of symmetry, the connecting portion are arranged or extend.

Also, the rotation axis may be oriented orthogonal to the extension direction of the connection portion in the initial state. In this case, the extension direction may in particular describe a direction along which a central center line, for example a central axis of symmetry, of the connecting section extends in the initial state. In this case, in the initial state, the connecting section may in particular have a straight course.

In this case, therefore, the above-explained relative movement of the carrier mounting portion and the sensor mounting portion in or against the direction of relative movement is made possible by a rotation about the axis of rotation and thus by the torsion spring portion. In the proposed embodiment, the at least one connecting portion may thus be oriented parallel to the surface to be scanned or approximately parallel to the surface. This results in the smallest possible impairment of a positioning of the detection device by the proposed device in an advantageous manner.

In a further embodiment, the connecting portion has two torsion spring sections with parallel axes of rotation. The torsion spring sections may in this case be arranged adjacent to one another along the center line of the connection section, in particular adjacent to a predetermined distance.

This results in an advantageous manner that when settling the detection device on the surface of the test object, in particular with a desired settling and / or probing force, no or only a slight change in the relative orientation between the carrier mounting portion and the sensor mounting portion results.

In a further embodiment, the device comprises two connecting sections arranged one above the other in the direction of relative movement, rotational axes of the torsion spring sections of the at least two connecting sections being oriented in parallel. Thus, the device can thus have two support arms, each with at least one, but preferably at least two, torsion spring sections. This results in an advantageous manner an improved attachment of the detection device to the support means, in particular, a change in the relative orientation between Trägerbefestigungsabschnitt and sensor attachment portion when settling on the workpiece, in particular with a predetermined settling and / or probing force is prevented or minimized.

In a further embodiment, the device comprises at least two connecting sections arranged next to each other along an axis of rotation of a torsion spring section, rotation axes of the torsion spring sections of the at least two connecting sections being oriented in parallel. In this embodiment, the detection device can be arranged between the connecting sections adjacent to the axis of rotation. The device preferably has two sensor attachment sections, wherein each sensor attachment section is connected to a common carrier attachment section or in each case one carrier attachment section via two connection sections arranged one above the other in the direction of relative movement. In this case, the detection device can be arranged between the two sensor attachment sections.

This results in an advantageously stable as possible suspension of the detection device to a support device. The at least two sensor attachment sections, the at least one carrier attachment section and the connection sections thus form a suspension frame which enables a spring-mounted suspension of the detection device on the carrier device.

In a preferred embodiment, the at least one torsion spring section is designed as a solid-body joint. The solid-state joint can in this case allow a relative movement, in particular a relative rotational movement, between two rigid body regions by means of a bend.

This results in an advantageous manner a simple design of the proposed device for holding the detection device.

Further proposed is an arrangement comprising a detection device for detecting properties of a measurement object, in particular properties of a surface of the measurement object. The arrangement further comprises a device according to one of the previously explained embodiments.

The detection device can have a settling and / or anadastring. The device can be fastened to a carrier device via at least one carrier attachment section. Furthermore, the device is attached to the detection device via at least one sensor attachment section.

Furthermore, the device has at least one spring element, wherein the spring element is arranged and / or designed such that the at least one carrier attachment section is movable relative to the at least one sensor attachment section at least in or against a relative direction of movement. In particular, the direction of relative movement can be oriented parallel to a settling and / or scanning direction of the detection device.

In a further embodiment, the arrangement comprises a carrier device, wherein the device is fastened to the carrier device via the at least one carrier attachment section.

The carrier device may in this case designate a device for setting a position and / or orientation of the detection device.

The carrier device can be, for example, a robot, a machine tool or another carrier device, which is preferably used in production processes. The carrier device can also be referred to as a positioning device.

In a further embodiment, the carrier device has a rotary-pivoting joint, wherein the device is fastened to the rotary-pivoting joint via the at least one carrier fastening section. Thus, a rotary-pan gauge system is provided.

As already explained in more detail above, the rotary-pivot joint may have a part rotatable about an axis of rotation, wherein the device is fastened to the rotatable part via the at least one carrier fastening section. Further, the rotary-pivot joint may have a fixed part relative to which the rotatable part is rotatable about the rotation axis. Also, the fixed part may be rotatable about a further axis of rotation.

The rotary-pivot joint thus denotes a joint which allows a relative rotation between ends of the joint about at least one axis of rotation. Preferably, the joint allows a relative rotation about at least two, preferably three, more preferably orthogonal to each other oriented, axes of rotation.

In a further embodiment, the carrier device is designed as a coordinate measuring machine. Here, the coordinate measuring machine may be a coordinate measuring machine in pillar or gantry design. The proposed device can be attached to one or a rotary-pivot joint of the coordinate measuring machine. The attachment may be a rigid attachment. Also, the attachment can be done via a suitable change interface.

Further proposed is a method for mounting a detection device for detecting properties of a measurement object on a carrier device by means of a device according to one of the previously explained embodiments. In this case, at least one carrier attachment portion of the device is attached to the carrier device. Furthermore, at least one sensor attachment portion of the device is attached to the detection device. Next, the attachment is such that the at least one support mounting portion is movable relative to at least one sensor attachment portion at least in or against a relative direction of movement. In particular, the direction of relative movement can be oriented parallel to a settling and / or scanning direction of the detection device. Next, the attachment can be made such that the relative movement is made possible by the at least one spring element.

This results in an advantageous manner attachment of the detection device to the support means such that a settling of the detection device on a surface of the workpiece to be detected with a desired orientation and a desired probing force is possible.

Also described is a method in which a probing force is detected, with which the detection device is positioned on the surface. The probing force can in this case for a position and / or orientation control, z. B. the carrier device can be used.

In particular, the detection device may be a device for detecting a roughness and / or a profile of a surface of a measurement object. The roughness here may designate a roughness of a surface height.

The detection device may comprise a static part. The static part here refers to a part of the detection device, which is arranged stationary during the detection, in particular is arranged on a surface of the measurement object. The static part may in turn be attached to the sensor attachment portion. Further, the detection means may comprise a movable part. In this case, the movable part designates a part which is moved along the surface for detecting the roughness and / or the profile, in particular is moved with a linear movement. In the following, the term stator is used for the static part and the term runner for the moving part.

Furthermore, the detection device may comprise at least one guide device for guiding a linear movement of the movable part and a device for generating a drive energy for driving the movable part in or against a desired direction of movement. The at least one guide device may in this case comprise stator-side guide means or elements and rotor-side guide means or elements. In particular, the at least one guide device can form a linear guide, wherein a linear guide ensures the most friction-free translational movement of the rotor while maintaining a straight direction of movement, ie along a linear path. Preferably, the at least one guide device is designed as a sliding guide. Of course, however, other forms of linear guide, e.g. Linear roller guides or roller designs conceivable. The guide device is in this case preferably designed such that the Abbe principle is met.

In this case, the device for generating a drive energy designates any device which can transmit drive energy to the movable part via a power transmission means, which will be explained in more detail below. In particular, the device for generating a drive energy can be designed as a device for generating a drive force. The device for generating the drive energy may in this case be arranged at least partially on the stator.

At least part of a probe system for detecting the roughness and / or the profile is arranged on the movable part. The stylus system denotes a set of elements for generating an output signal representing the roughness and / or the profile, in particular an electrical output signal.

The probe system may in this case comprise at least one probe element for scanning the surface. The stylus system can be used as Be touching stylus system formed. The stylus system can z. As a button and / or a probe element, such as a probe ball, probe tip or needle include. In this case, part of the stylus system contacts the surface during roughness and / or profile detection.

Alternatively, the stylus system can also be designed as a contactless stylus system, which allows a non-contact, in particular optical, detection of the roughness and / or the profile.

Preferably, the probe system comprises the probe element and a probe arm, wherein the probe element is attached or mounted on the probe arm, in particular at a free end of the probe arm. The sensing arm can also be referred to as a feeler lever.

In the case of a touching probe system, the probe arm may be movably mounted on the rotor, in particular pivotally mounted about a rotation axis.

Furthermore, the probe system may include a transducer or a measured value generator which generates an output signal in dependence of which the roughness and / or the profile can be determined. In the case of a touching probe element, for example, the transmitter may generate an output signal in response to a deflection of the probe element. For this purpose, the transmitter may for example be designed as a motion or position sensor. For example, the transmitter can be designed as an optical, capacitive, inductive or magnetic encoder, by means of the encoder, the movement and / or position of the probe element is directly or indirectly detected. A magnetic encoder can be designed here as a magnetic resonance transmitter. It is also conceivable that the transmitter detects a rotation of the pivotally mounted sensing arm, wherein in dependence on a length of the sensing arm and the detected rotation angle, the deflection of the probe element can be detected.

Preferably, the entire stylus system, but in particular the probe element, on the movable part, ie the rotor, arranged.

Furthermore, the drive energy explained above can be transmitted to the movable part via at least one energy transmission means. The at least one energy transfer means in this case denotes the means by which the driving force acting on the movable part is provided. An energy transfer from the device for generating the drive energy to the moving part thus takes place at least partially via the energy transmission means. The energy transfer from the device for generating the drive energy to the moving part can be purely mechanical, at least partially mechanical or purely non-mechanical. However, the energy transfer means as part of the transmission path can only allow a mechanical transmission or a non-mechanical transmission. The at least one energy transmission means thus forms part of a transmission path for the drive energy from the device for generating the drive energy to the moving part, in particular the last part of the transmission path in one direction from the device for generating the drive energy to the moving part. In this case, the at least one energy transmission means comprises all elements which serve to transmit the drive energy generated by the device for generating the drive energy to the movable part and / or to provide a driving force acting on the movable part. Thus, a power transmission means may also comprise a power conversion element, e.g. converts a generated and possibly transmitted drive energy into a driving force. In this case, the at least one energy transmission means can be arranged between a movable element of the device for generating the drive energy, for example an output shaft of an actuator, and the movable part.

The at least one energy transferring means may e.g. be designed as a power transmission means.

Further, the energy transfer means is a mechanical or a non-mechanical energy transfer means, wherein a mechanical energy transfer means is formed such that during an energy transfer to the movable part at least in a direction different from the desired direction of movement no force acts or can act on the movable part. By a mechanical energy transfer means, a mechanical energy transfer takes place, by a non-mechanical energy transfer means is a non-mechanical energy transfer.

In a mechanical energy transmission, for example, the energy transmission means as a means for mechanical power transmission, such as shafts, gears, be formed. Means for mechanical power transmission may be in particular mechanical components. In a purely mechanical energy transfer, for example, only means for mechanical power transmission can be used. In this case, the at least one energy transmission means may be designed such that a purely mechanical transmission of forces in at least one of the desired Movement direction different direction is not possible. This may mean that, via the at least one energy transmission means, a force which is directed in the at least one direction different from the desired direction of movement is not mechanically transferable. Thus, if at least part of the drive energy or the entire drive energy is transmitted mechanically, no force acts on the movable part, at least in a direction different from the desired direction of movement.

In summary, it follows that in one, in particular a pure, mechanical energy transfer no force is transmitted in at least one direction different from the desired direction of movement and / or acts on the movable part.

Preferably, in the case of an at least partial mechanical transmission of the drive energy, the at least one energy transmission means is designed in such a way that during transmission of drive energy a force is transmitted exclusively in or against a direction of movement and / or acts on the movable part.

In other words, this means that when the drive energy is generated, in particular when a drive force is generated by the device for generating the drive energy, a, in particular purely, mechanical transmission of the energy, in particular the force, is not possible or only possible in this way, that in the at least one direction different from the desired direction of movement no force acts on the runner. In one, especially pure, mechanical transmission can, for. B. a force component, which is directed in the direction different from the desired direction of movement, are filtered out.

This advantageously makes it possible, with an at least partial, but in particular purely mechanical, transmission of the drive energy to reduce forces that are not oriented in the direction of movement. For example, thus lateral forces can be effectively minimized. This, in turn, increases the accuracy of the detection, since no deviation from the desired linear movement and thus from a desired measurement path occurs due to the force minimization explained above.

By means of the proposed device, however, a non-mechanical, in particular a purely non-mechanical, energy transmission can also take place. This means, for example, that magnetic or electromagnetic transmission of forces is possible. Here, the at least one energy transmission means may be designed such that such non-mechanically transmitted drive energy is converted into a force acting on the movable part driving force acting in or against the direction of movement.

In an at least partial non-mechanical energy transfer, the energy transfer means may be formed as a means for non-mechanical energy or power transmission. The energy transfer means may in this case, for example, enable a magnetic or electromagnetic transmission of forces. Here, the at least one energy transmission means may be designed such that such non-mechanically transmitted drive energy is converted into a force acting on the movable part driving force acting in or against the direction of movement.

Also, the non-mechanical energy transfer means may be formed such that during an energy transfer to the movable part at least in a direction different from the desired direction of movement no force acts. However, this is not mandatory. Thus, in the case of non-mechanical energy transfer, it can not be ruled out that forces which act in one or more directions, in particular all directions different from the direction of movement, also act and / or are transmitted to the moving part.

Thus, embodiments are also conceivable in which a drive energy is partially mechanical, e.g. via mechanical energy transfer elements, as well as nonmechanical, e.g. via non-mechanical energy transfer element, is transmitted.

If the drive energy is not or not completely transferred mechanically, then forces deviating from the direction of movement are not transmitted mechanically, this likewise improving a movement of the movable part along the desired measuring path.

Of course, the detection device may also comprise a housing, wherein at least a part of the detection device may be arranged within the housing. The housing may for example be part of the stator or attached to the stator.

As previously explained, the detection device can have at least one support element for depositing the static part on a measurement object. In the settled state, the static part is mounted on the measurement object via the at least one support element. Thus, the static part on the at least one support element in mechanical contact with the measurement object, in particular a surface of the measurement object. In this case, the detection device can exclusively comprise a support element for mounting the static part on a workpiece.

The support element can be used to set a reference distance between the detection device, in particular a probe and / or probe element of the detection device, and the surface. The at least one support element can in this case be fastened mechanically detachably to the detection device, in particular to the static part. As a result, support elements with different geometries can be attached to the static part in an advantageous manner. This advantageously enables a storage of the static part on the workpiece adapted to different surface topologies. For example, the support element may have a flat support surface. Alternatively, a support element may have a convex or concave support surface. Further alternatively, a support member having a stepped support surface. Thus, a support member is generally described which has a support surface adapted to a surface topology of the workpiece with the surface to be detected. In this case, the support surface describes a part of a surface of the support element, which in the stepped-out state is in mechanical contact with the measurement object, in particular a surface of the measurement object. Thus, the support element can preferably serve with a convex support surface for support on an outer circumferential surface of a cylinder. A concave support surface can be used for support on inner lateral surfaces of a hollow cylinder. Thus, the at least one support element can also be used as a centering or positioning aid with respect to the workpiece to be detected, in particular together with the stylus system used.

The invention will be explained in more detail with reference to an embodiment. The figures show:

1 a schematic block diagram of an inventive arrangement,

2 a perspective view of an arrangement according to the invention,

3 a side view of in 2 illustrated arrangement and

4 a top view of the in 2 illustrated arrangement.

1 provides a schematic block diagram of an inventive arrangement 1 The arrangement comprises one as a sensor 2 designated detection device. The sensor 2 includes a sensing arm 3 and a stylus tip 4 attached to a free end of the probe arm 3 is arranged. The probe tip 4 is formed conical here. In 1 is shown that the sensor 2 a support element 5 and on a surface 6 a measuring object (not shown) is discontinued. This is the Tastspitze 4 on the surface 6 on.

The probe tip 4 In this case, it can be moved along a longitudinal axis x along a preferably linear measuring path. Here, the Tastspitze 4 and thus also the probe arm 3 be deflected. The deflection takes place here at least proportionally in a vertical direction, which is indicated by an arrowhead of a vertical axis z. Shown is further a centerline 7 the probe tip 4 , wherein a scanning direction AR of the sensor 2 in an undeflected state of the sensor 2 along the midline 7 and oriented opposite to the previously explained vertical direction. The scanning direction AR can also be perpendicular to the surface to be detected 6 be oriented.

The probing direction AR corresponds to a settling direction of the sensor 2 wherein the settling direction is perpendicular to a contact surface 19 of the sensor 2 is oriented. The contact surface 19 hereby designates an area that is at the time of settling the sensor 2 in contact with the surface 6 of the measuring object is.

Next, the arrangement includes 1 a device 8th for mounting the sensor 2 , The device 8th has a sensor attachment section 9 on, with the sensor 2 , in particular a housing of the sensor 2 at the sensor attachment portion 9 is attached. Next, the device 8th a carrier attachment portion 10 on, wherein a carrier device 11 at the carrier attachment portion 10 is attached.

Schematically illustrated are a first spring element, which as the first torsion spring section 12a is formed and another spring element, which serves as a second torsion spring section 12b is formed in a connecting portion 13 the carrier attachment section 10 and the sensor attachment section 9 are arranged. The spring elements are in this case designed as a solid state joints. The torsion spring sections 12a . 12b are in particular each as a taper of the connecting portion 13 educated

The spring elements in this case allow the carrier attachment section 10 relative to the sensor attachment portion 9 is movable in or against a relative direction of movement. In the illustrated embodiment, the relative direction of movement is parallel to the scanning direction AR of sensor 2 oriented. In particular, allow the spring elements 12a . 12b Thus, a relative movement with a relative direction of movement along the vertical direction z.

In 1 is shown that the carrier device 11 a turn-pivot joint 14 and a coordinate measuring machine 15 includes. The rotary-swivel joint 14 For example, at a free end of a quill (not shown) of the coordinate measuring machine 15 be attached.

In 2 is a perspective view of an arrangement according to the invention 1 shown. The order 1 includes a sensor 2 , where only one sensor housing 16 and no further elements of the sensor 2 are shown. Also shown is a vertical axis z, a longitudinal axis x and a lateral axis y orthogonal to both axes x, z. A device for holding the sensor 2 has a first connection section 17a and another connection section 17b on. About the connecting sections 17a . 17b is a first sensor attachment section 9a with a carrier attachment portion 10 connected. Each connection section 17a . 17b here has a first torsion spring section 12a and another torsion spring section 12b on, which are each designed as a solid state joints. About the first torsion spring section 12a is the first sensor attachment section 9a with a rigid intermediate section 18a . 18b connected. About the respective second torsion spring section 12b is the rigid intermediate section 18a . 18b with the carrier attachment portion 10 connected. The connecting sections 17a . 17b are here in Antastrichtung AR (see 1 ) and thus in particular in the vertical direction one above the other. Rotation axes of the torsion spring sections 12a . 12b extend parallel to the lateral axis y.

When settling the sensor 2 on the surface 6 is through the illustrated connecting sections 17a . 17b a relative movement between the sensor 2 and a turn-pivot joint 14 allows. Here is only a mounting plate of the rotary-pivot joint 14 shown.

The rotary-swivel joint 14 this allows a rotation about the longitudinal axis x and the vertical axis z. Preferably, the rotary-pivot joint also allow rotation about the lateral axis y.

In 3 is a side view of the arrangement 1 out 2 shown. In contrast to 2 Here is a support element 5 of the sensor 2 shown, being a static part of the sensor 2 by means of the support element 5 on the surface 6 is arranged or set down. Further shown is a Tastspitze 4 formed sensing element, which is movable along the longitudinal axis x and for touching detection or scanning of the surface 6 serves. As well as in 2 are a first and a second connection section 17a . 17b shown, each having a first and another torsion spring portion 12a . 12b and a rigid intermediate section 18a . 18b include. About connecting sections 17a . 17b is a common sensor attachment section 9a with a carrier attachment portion 10 mechanically connected.

4 shows a plan view of the in 2 illustrated arrangement 1 , In this case, in particular, a third connecting portion 17c shown, which also has a first torsion spring portion 12a , a second torsion spring portion 12b and a rigid intermediate section 18c includes. About the third connection section 17c is a second sensor attachment section 9b with the common carrier attachment portion 10 connected. Here it is shown that the first connection section 17a along the lateral axis y and thus also along the axes of rotation of the torsion spring sections 12 . 12b spaced from the third connecting portion 17c is arranged. Thus, the third connection portion 17c along the axes of rotation of the rotary sections 12a . 12b adjacent to the first connecting portion 17a arranged. The sensor 2 is here between the first sensor attachment section 9a and the second sensor attachment portion 9b arranged.

In 4 not shown is a fourth connecting portion, which in turn may have a first and a second torsion spring portion and a rigid intermediate portion and in the vertical direction below the third connecting portion 17c can be arranged. Here, the fourth connection portion also connects the second sensor attachment portion 9b with the common carrier attachment portion 10 , Thus, the sensor 2 suspended in a sprung frame, which has a relative movement between sensor 2 and support means 14 along the vertical axis z (see 2 ) allows.

By means of the torsion spring sections 12a . 12b the connecting sections 17a . 17b . 17c can also be a probing force of the sensor 2 on the surface 6 be set.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 202008011629 U1 [0003]
• DE 202013102043 U1 [0004]
• DE 202013102045 U1 [0005]
• DE 102006011904 A1 [0006]
• DE 102006050838 A1 [0007]
• DE 102009035747 A1 [0008]
• DE 102008038599 A1 [0010]
• DE 10131160 A1 [0011]
• DE 102010018250 A1 [0012]
• DE 102010054973 A1 [0013]

Claims (14)

Device for holding a detection device for detecting properties of a measurement object on a carrier device ( 11 ), wherein the device has at least one carrier attachment section ( 10 ) for fastening the device to the carrier device ( 11 ), wherein the device has at least one sensor attachment section ( 9 . 9a . 9b ) for fixing the device to the detection device, characterized in that the device comprises at least one spring element, wherein the spring element is arranged and / or formed such that the at least one support mounting portion ( 10 ) relative to the at least one sensor attachment section ( 9 . 9a . 9b ) is movable at least in or against a relative direction of movement. Apparatus according to claim 1, characterized in that the device has a depositing and / or scanning direction (AR), wherein the relative movement direction is oriented parallel to the depositing direction and / or the scanning direction (AR) to be attached to the sensor mounting portion detecting means. Apparatus according to claim 1 or 2, characterized in that the device comprises means for detecting a settling and / or probing force. Apparatus according to claim 3, characterized in that the means for detecting a settling and / or probing force comprises means for detecting a deflection in or against the direction of relative movement. Device according to one of claims 1 to 4, characterized in that the device at least one connecting portion ( 17a . 17b . 17c ), wherein the carrier attachment portion ( 10 ) and the sensor attachment section ( 9 . 9a . 9b ) over the connecting section ( 17a . 17b . 17c ), wherein the connecting section ( 17a . 17b . 17c ) at least one torsion spring section ( 12a . 12b ), wherein the torsion spring section ( 12a . 12b ) has an axis of rotation which is oriented orthogonal to the relative direction of movement. Apparatus according to claim 5, characterized in that the connecting portion ( 17a . 17b . 17c ) two torsion spring sections ( 12a . 12b ) having parallel axes of rotation. Device according to one of claims 5 or 6, characterized in that the device two in the direction of relative movement one above the other arranged connecting portions ( 17a . 17b ), wherein rotational axes of the torsion spring sections ( 12a . 12b ) of the at least two connecting sections ( 17a . 17b ) are oriented in parallel. Device according to one of claims 5 to 7, characterized in that the device at least two along a rotational axis of a torsion spring portion ( 12a . 12b ) juxtaposed connecting sections ( 17a . 17c ), wherein rotational axes of the torsion spring sections ( 12a . 12b ) of the at least two connecting sections ( 17a . 17c ) are oriented in parallel. Device according to one of claims 5 to 8, characterized in that the at least one torsion spring section ( 12a . 12b ) is designed as a solid-body joint. Arrangement comprising a device for detecting properties of a test object and a device according to one of claims 1 to 9, wherein the device has at least one support attachment section (11). 10 ) on a carrier device ( 11 ) is attachable, wherein the device via at least one sensor attachment portion ( 9a . 9b . 9c ) is attached to the detection device, wherein the device comprises at least one spring element, wherein the spring element is arranged and / or formed such that the at least one support mounting portion ( 10 ) relative to the at least one sensor attachment section ( 9 . 9a . 9b ) is movable at least in or against a relative direction of movement. Arrangement according to claim 10, characterized in that the arrangement ( 1 ) a carrier device ( 11 ), wherein the device is connected via the at least one support attachment section ( 10 ) on the carrier device ( 11 ) is attached. Arrangement according to claim 11, characterized in that the carrier device ( 10 ) a rotary-swivel joint ( 14 ), wherein the device is connected via the at least one support attachment section ( 10 ) on the rotary swivel joint ( 14 ) is attached. Arrangement according to claim 11 or 12, characterized in that the carrier device is designed as a coordinate measuring machine. Method for mounting a detection device for detecting properties of a measurement object on a support device ( 10 ) by means of a device according to one of claims 1 to 9, wherein at least one carrier attachment portion ( 10 ) of the device on the carrier device ( 11 ), wherein at least one sensor attachment portion ( 9a . 9b . 9c ) of the device is attached to the detection device, wherein the Attachment is carried out such that the at least one support mounting portion ( 10 ) relative to the at least one sensor attachment section ( 9a . 9b . 9c ) is movable at least in or against a relative direction of movement.

Images