CA2262540A1 - Apparatus and methods for cleaning delicate parts - Google Patents

Apparatus and methods for cleaning delicate parts

Info

Publication number
CA2262540A1
CA2262540A1 CA002262540A CA2262540A CA2262540A1 CA 2262540 A1 CA2262540 A1 CA 2262540A1 CA 002262540 A CA002262540 A CA 002262540A CA 2262540 A CA2262540 A CA 2262540A CA 2262540 A1 CA2262540 A1 CA 2262540A1
Authority
CA
Canada
Prior art keywords
transducers
liquid
frequency
bandwidth
microsonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002262540A
Other languages
French (fr)
Other versions
CA2262540C (en
Inventor
William L. Puskas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2262540A1 publication Critical patent/CA2262540A1/en
Application granted granted Critical
Publication of CA2262540C publication Critical patent/CA2262540C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/10—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0223—Driving circuits for generating signals continuous in time
    • B06B1/0269—Driving circuits for generating signals continuous in time for generating multiple frequencies
    • B06B1/0276—Driving circuits for generating signals continuous in time for generating multiple frequencies with simultaneous generation, e.g. with modulation, harmonics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0618—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile of piezo- and non-piezoelectric elements, e.g. 'Tonpilz'
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/004—Mounting transducers, e.g. provided with mechanical moving or orienting device
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/004—Mounting transducers, e.g. provided with mechanical moving or orienting device
    • G10K11/006—Transducer mounting in underwater equipment, e.g. sonobuoys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70—Specific application
    • B06B2201/71—Cleaning in a tank

Abstract

Clamped ultrasonic transducers are driven at harmonic resonant frequencies in a range of 100 kHz - 350 kHz to impart microsonic frequencies to process liquid. The application of microsonic frequencies to liquid preferably occurs simultaneously with a sweeping of the microsonic frequency within the transducer's (122) harmonic bandwidth to reduce or eliminate (a) standing waves within the liquid, (b) other resonances, (c) high energy cavitation implosion, and (d) non-uniform sound fields, each of which is undesirable for cleaning and/or processing of semiconductor wafers and other delicate parts. The invention can also drive ultrasonic transducers (122) such that the frequency of applied energy has a sweep rate within the ultrasonic bandwidth of the transducers; and that sweep rate is also varied so that the sweep rate is substantially non-constant during operation. An ultrasound generator of the invention sometimes utilizes amplitude modulation (AM), and the AM frequency is swept over time so as to reduce resonances. Two or more transducers are sometimes used by the invention, in combination, to broaden the overall bandwidth of acoustical energy applied to the liquid around the primary frequency or one of the harmonics. The bandwidths of the transducers are made to overlap such that an attached generator can drive the transducers, in combination, to deliver ultrasound to the liquid in a broader bandwidth.
CA002262540A 1996-08-05 1997-08-01 Apparatus and methods for cleaning delicate parts Expired - Lifetime CA2262540C (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US2315096P 1996-08-05 1996-08-05
US60/023,150 1996-08-05
US08/718,945 1996-09-24
US08/718,945 US5834871A (en) 1996-08-05 1996-09-24 Apparatus and methods for cleaning and/or processing delicate parts
PCT/US1997/012853 WO1998006143A1 (en) 1996-08-05 1997-08-01 Apparatus and methods for cleaning delicate parts

Publications (2)

Publication Number Publication Date
CA2262540A1 true CA2262540A1 (en) 1998-02-12
CA2262540C CA2262540C (en) 2008-02-05

Family

ID=26696789

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002262540A Expired - Lifetime CA2262540C (en) 1996-08-05 1997-08-01 Apparatus and methods for cleaning delicate parts

Country Status (6)

Country Link
US (6) US5834871A (en)
AU (1) AU3962197A (en)
CA (1) CA2262540C (en)
MY (1) MY121247A (en)
TW (1) TW407066B (en)
WO (1) WO1998006143A1 (en)

Families Citing this family (137)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6016821A (en) * 1996-09-24 2000-01-25 Puskas; William L. Systems and methods for ultrasonically processing delicate parts
US5834871A (en) * 1996-08-05 1998-11-10 Puskas; William L. Apparatus and methods for cleaning and/or processing delicate parts
US6653760B1 (en) * 1996-05-09 2003-11-25 Crest Ultrasonics Corporation Ultrasonic transducer using third harmonic frequency
US7210354B2 (en) 1997-06-16 2007-05-01 Puskas William L Sensing system for measuring cavitation
US20060086604A1 (en) * 1996-09-24 2006-04-27 Puskas William L Organism inactivation method and system
US6462461B1 (en) 2000-06-30 2002-10-08 William L. Puskas Circuitry to modify the operation of ultrasonic generators
US6822372B2 (en) 1999-08-09 2004-11-23 William L. Puskas Apparatus, circuitry and methods for cleaning and/or processing with sound waves
US7336019B1 (en) * 2005-07-01 2008-02-26 Puskas William L Apparatus, circuitry, signals, probes and methods for cleaning and/or processing with sound
US6313565B1 (en) * 2000-02-15 2001-11-06 William L. Puskas Multiple frequency cleaning system
US7629726B2 (en) * 2007-07-11 2009-12-08 Puskas William L Ultrasound system
US8075695B2 (en) * 1996-08-05 2011-12-13 Puskas William L Apparatus, circuitry, signals, probes and methods for cleaning and/or processing with sound
US20080047575A1 (en) * 1996-09-24 2008-02-28 Puskas William L Apparatus, circuitry, signals and methods for cleaning and processing with sound
US6039059A (en) 1996-09-30 2000-03-21 Verteq, Inc. Wafer cleaning system
US5925966A (en) * 1997-08-08 1999-07-20 Green Clouds Ltd. Method for protecting ultrasonic transducers from deterioration
US6290778B1 (en) 1998-08-12 2001-09-18 Hudson Technologies, Inc. Method and apparatus for sonic cleaning of heat exchangers
US6424076B1 (en) * 1998-10-07 2002-07-23 The B. F. Goodrich Company Incremental switched deformable mirror
US6492284B2 (en) * 1999-01-22 2002-12-10 Semitool, Inc. Reactor for processing a workpiece using sonic energy
US6799583B2 (en) * 1999-05-13 2004-10-05 Suraj Puri Methods for cleaning microelectronic substrates using ultradilute cleaning liquids
JP2000325882A (en) * 1999-05-24 2000-11-28 Nec Corp Piezoelectric drive circuit and drive method
US6276370B1 (en) 1999-06-30 2001-08-21 International Business Machines Corporation Sonic cleaning with an interference signal
US6503081B1 (en) 1999-07-01 2003-01-07 James Feine Ultrasonic control apparatus and method
CA2403865A1 (en) 1999-09-14 2001-03-22 Charles R. Meldrum Produce washing system utilizing multiple energy sources
CA2381576A1 (en) 1999-09-14 2001-03-22 Charles R. Meldrum Multiple-stage energy-efficient produce processing system
US6372389B1 (en) 1999-11-19 2002-04-16 Oki Electric Industry Co, Ltd. Method and apparatus for forming resist pattern
AU2001270205A1 (en) * 2000-06-26 2002-01-08 Applied Materials, Inc. Method and apparatus for wafer cleaning
US7451774B2 (en) * 2000-06-26 2008-11-18 Applied Materials, Inc. Method and apparatus for wafer cleaning
US20020157685A1 (en) * 2000-09-11 2002-10-31 Naoya Hayamizu Washing method, method of manufacturing semiconductor device and method of manufacturing active matrix-type display device
DE10109932A1 (en) * 2001-02-21 2002-08-22 Brunner Und Joachim Straka Johann Piezo element for ultrasound generation and piezoelectric transducer
EP1238715A1 (en) * 2001-03-05 2002-09-11 Prokic Miodrag Multifrequency ultrasonic structural actuators
JP5067821B2 (en) * 2001-04-13 2012-11-07 古野電気株式会社 Multi-frequency transducer
WO2003012889A1 (en) 2001-07-30 2003-02-13 Blackstone-Ney Ultrasonics Highpower ultrasonic transducer with broadband frequency characteristics
JP3948960B2 (en) * 2002-01-16 2007-07-25 東京エレクトロン株式会社 Ultrasonic cleaning equipment
KR20050103916A (en) * 2003-02-04 2005-11-01 포워드 테크놀로지 에이 크레스트 그룹 컴퍼니 Ultrasonic cleaning tank
US6691578B1 (en) * 2003-02-28 2004-02-17 William L. Puskas Measurement systems for ultrasound in a vessel
US20040251780A1 (en) * 2003-05-09 2004-12-16 Goodson J. Michael Advanced ceramics in ultrasonic transducerized devices
US6890390B2 (en) * 2003-05-22 2005-05-10 Lawrence Azar Method for ultrasonic cleaning using phased transducer arrays
US7645343B2 (en) * 2003-06-12 2010-01-12 Sez America, Inc. Uniform cavitation for particle removal
EP1652224A2 (en) * 2003-07-31 2006-05-03 FSI International, Inc. Controlled growth of highly uniform, oxide layers, especially ultrathin layers
IL157229A (en) * 2003-08-04 2006-08-20 Zamir Tribelsky Method for energy coupling especially useful for disinfecting and various systems using it
GB0319040D0 (en) * 2003-08-13 2003-09-17 Unilever Plc Blanching vegetables
US7495371B2 (en) * 2003-09-08 2009-02-24 The Crest Group, Inc. Cleaning tank with sleeved ultrasonic transducer
US20050098194A1 (en) * 2003-09-11 2005-05-12 Christenson Kurt K. Semiconductor wafer immersion systems and treatments using modulated acoustic energy
CN1849183A (en) * 2003-09-11 2006-10-18 Fsi国际公司 Acoustic diffusers for acoustic field uniformity
US20050077182A1 (en) * 2003-10-10 2005-04-14 Applied Materials, Inc. Volume measurement apparatus and method
WO2005044440A2 (en) * 2003-11-05 2005-05-19 The Crest Group, Inc. Ultrasonic apparatus with multiple frequency transducers
EP1696818B2 (en) * 2003-12-15 2018-08-15 Koninklijke Philips N.V. Changing amplitude of movement by changing the drive frequency of a toothbrush brushhead
CN101124053B (en) * 2004-09-15 2012-05-23 艾奎昂技术股份有限公司 System and method of powering a sonic energy source and use of the same to process substrates
US20060107975A1 (en) * 2004-09-20 2006-05-25 David Arguelles Field transportable high-power ultrasonic transducer assembly
US20060130870A1 (en) * 2004-12-21 2006-06-22 Ping Cai Method for sonic cleaning of reactor with reduced acoustic wave cancellation
DE102005021985A1 (en) * 2005-05-09 2006-11-16 Rena Sondermaschinen Gmbh Sound generation and emission method for cleaning articles immersed in fluid involves generating signals that are modulated according to frequency or intensity
US20070103034A1 (en) * 2005-11-04 2007-05-10 Impulse Devices Inc. Acoustic driver assembly with increased head mass displacement amplitude
TWI393595B (en) 2006-03-17 2013-04-21 Michale Goodson J Megasonic processing apparatus with frequencey sweeping of thickness mode transducers
US20070235058A1 (en) * 2006-04-10 2007-10-11 Daniel Harrington System and method for removing residue from a wafer processing chamber using sound waves
TWI352628B (en) * 2006-07-21 2011-11-21 Akrion Technologies Inc Nozzle for use in the megasonic cleaning of substr
KR101049300B1 (en) * 2006-09-22 2011-07-13 가부시끼가이샤가이죠 Ultrasonic Cleaner
US7669478B2 (en) * 2006-10-13 2010-03-02 Zmi Electronics Ltd. Ultrasonic driving device with multi-frequency scanning
US8517728B2 (en) 2007-01-24 2013-08-27 Colgate-Palmolive Company Oral care implement having fluid delivery system
US20080312460A1 (en) * 2007-06-13 2008-12-18 Goodson J Michael Multi-Frequency Ultrasonic Apparatus and Process for Producing Biofuels
US7530272B2 (en) * 2007-08-15 2009-05-12 Chang Gung University Multiple frequency ultrasound apparatus
WO2009038456A1 (en) * 2007-09-18 2009-03-26 Röntgen Technische Dienst B.V. Inspection device and method for inspection
GB0722256D0 (en) * 2007-11-13 2007-12-27 Johnson Matthey Plc Level measurement system
US20090173358A1 (en) * 2008-01-09 2009-07-09 Micron Technology, Inc. Megasonic cleaning with controlled boundary layer thickness and associated systems and methods
PE20100041A1 (en) * 2008-03-25 2010-02-06 Albemarle Corp METHODS TO REDUCE OR ELIMINATE BACTERIA FROM HUMAN CONSUMING EGGS
JP2009248066A (en) * 2008-04-11 2009-10-29 Tiyoda Electric Co Ltd Ultrasonic cleaning device
US20100126942A1 (en) * 2008-11-20 2010-05-27 Thottathil Sebastian K Multi-frequency ultrasonic apparatus and process with exposed transmitting head
WO2010058293A2 (en) * 2008-11-21 2010-05-27 Insightec Ltd. Method and apparatus for washing fabrics using focused ultrasound
JP2010162487A (en) * 2009-01-16 2010-07-29 Sony Corp Piezo-electric vibration device system and electrical appliance
US20110132404A1 (en) * 2009-03-16 2011-06-09 Lutz Todd M Method and apparatus for cleaning of laparoscopic surgical instruments
US8331196B2 (en) * 2009-04-14 2012-12-11 Covaris, Inc. System and method for controlling an acoustic transducer
US9475099B2 (en) * 2009-10-12 2016-10-25 Ultrasonic Power Corporation Ultrasonic cleaning system with transducer failure indicator
US8691145B2 (en) 2009-11-16 2014-04-08 Flodesign Sonics, Inc. Ultrasound and acoustophoresis for water purification
CN102762125B (en) * 2010-02-26 2015-06-03 高露洁-棕榄公司 Fluid delivery system for an oral care implement
WO2011109590A1 (en) * 2010-03-03 2011-09-09 Northeastern University Damage free cleaning using narrow band megasonic cleaning
US8398326B2 (en) 2010-03-04 2013-03-19 Colgate-Palmolive Company Fluid dispensing oral care implement
US10640357B2 (en) 2010-04-14 2020-05-05 Restaurant Technology Inc. Structural food preparation systems and methods
US20140136366A1 (en) 2012-11-12 2014-05-15 Restaurant Technology Inc. System and method for receiving and managing remotely placed orders
US10852069B2 (en) 2010-05-04 2020-12-01 Fractal Heatsink Technologies, LLC System and method for maintaining efficiency of a fractal heat sink
US9228785B2 (en) 2010-05-04 2016-01-05 Alexander Poltorak Fractal heat transfer device
EP2582631A4 (en) 2010-06-16 2016-05-25 Flodesign Sonics Inc Phononic crystal desalination system and method of use
JP5470186B2 (en) * 2010-07-30 2014-04-16 日本発條株式会社 Inspection device cleanliness inspection device and cleanliness inspection method
US9421553B2 (en) 2010-08-23 2016-08-23 Flodesign Sonics, Inc. High-volume fast separation of multi-phase components in fluid suspensions
MY188904A (en) * 2010-10-05 2022-01-13 Univ Putra Malaysia A method and apparatus for high intensity ultrasonic treatment of baking materials
MX341247B (en) 2011-03-09 2016-08-12 Colgate Palmolive Co Interdental cleaning device.
EP2848156B1 (en) 2011-03-28 2016-05-18 Colgate-Palmolive Company Toothbrush having oral care fluid delivery
US9190881B1 (en) 2011-08-02 2015-11-17 Tooltek Engineering Corporation Rotary-powered mechanical oscillator
US9086346B2 (en) * 2011-10-21 2015-07-21 National Chung Cheng University Method for processing a sensor chip
US10953436B2 (en) 2012-03-15 2021-03-23 Flodesign Sonics, Inc. Acoustophoretic device with piezoelectric transducer array
US9567559B2 (en) 2012-03-15 2017-02-14 Flodesign Sonics, Inc. Bioreactor using acoustic standing waves
US9688958B2 (en) 2012-03-15 2017-06-27 Flodesign Sonics, Inc. Acoustic bioreactor processes
US9796956B2 (en) 2013-11-06 2017-10-24 Flodesign Sonics, Inc. Multi-stage acoustophoresis device
US9752114B2 (en) 2012-03-15 2017-09-05 Flodesign Sonics, Inc Bioreactor using acoustic standing waves
US9272234B2 (en) 2012-03-15 2016-03-01 Flodesign Sonics, Inc. Separation of multi-component fluid through ultrasonic acoustophoresis
US10370635B2 (en) 2012-03-15 2019-08-06 Flodesign Sonics, Inc. Acoustic separation of T cells
US9745548B2 (en) 2012-03-15 2017-08-29 Flodesign Sonics, Inc. Acoustic perfusion devices
US9752113B2 (en) 2012-03-15 2017-09-05 Flodesign Sonics, Inc. Acoustic perfusion devices
US10967298B2 (en) 2012-03-15 2021-04-06 Flodesign Sonics, Inc. Driver and control for variable impedence load
US9950282B2 (en) 2012-03-15 2018-04-24 Flodesign Sonics, Inc. Electronic configuration and control for acoustic standing wave generation
US9458450B2 (en) 2012-03-15 2016-10-04 Flodesign Sonics, Inc. Acoustophoretic separation technology using multi-dimensional standing waves
US10689609B2 (en) 2012-03-15 2020-06-23 Flodesign Sonics, Inc. Acoustic bioreactor processes
US9783775B2 (en) 2012-03-15 2017-10-10 Flodesign Sonics, Inc. Bioreactor using acoustic standing waves
US10322949B2 (en) 2012-03-15 2019-06-18 Flodesign Sonics, Inc. Transducer and reflector configurations for an acoustophoretic device
US10704021B2 (en) 2012-03-15 2020-07-07 Flodesign Sonics, Inc. Acoustic perfusion devices
US11324873B2 (en) 2012-04-20 2022-05-10 Flodesign Sonics, Inc. Acoustic blood separation processes and devices
US10737953B2 (en) 2012-04-20 2020-08-11 Flodesign Sonics, Inc. Acoustophoretic method for use in bioreactors
EP2703094B1 (en) 2012-08-27 2019-10-02 IMEC vzw A system for delivering ultrasonic energy to a liquid and its use for cleaning of solid parts
GB2506939B (en) 2012-10-15 2017-04-05 Alphasonics (Ultrasonic Cleaning Systems) Ltd Improvements in and relating to ultrasonic cleaning
EP2911554B1 (en) 2012-10-26 2017-04-26 Colgate-Palmolive Company Oral care implement
US9242340B1 (en) * 2013-03-12 2016-01-26 Western Digital Technologies, Inc. Method to stress relieve a magnetic recording head transducer utilizing ultrasonic cavitation
US9675747B2 (en) 2013-03-15 2017-06-13 William L Puskas Methods and systems for improved cavitation efficiency and density, cancer cell destruction, and/or causing a target object to be a cavitation nucleus
US9745569B2 (en) 2013-09-13 2017-08-29 Flodesign Sonics, Inc. System for generating high concentration factors for low cell density suspensions
EP3092049A1 (en) 2014-01-08 2016-11-16 Flodesign Sonics Inc. Acoustophoresis device with dual acoustophoretic chamber
US9744483B2 (en) 2014-07-02 2017-08-29 Flodesign Sonics, Inc. Large scale acoustic separation device
US10106770B2 (en) 2015-03-24 2018-10-23 Flodesign Sonics, Inc. Methods and apparatus for particle aggregation using acoustic standing waves
US11708572B2 (en) 2015-04-29 2023-07-25 Flodesign Sonics, Inc. Acoustic cell separation techniques and processes
CA2984492A1 (en) 2015-04-29 2016-11-03 Flodesign Sonics, Inc. Acoustophoretic device for angled wave particle deflection
US11377651B2 (en) 2016-10-19 2022-07-05 Flodesign Sonics, Inc. Cell therapy processes utilizing acoustophoresis
US11021699B2 (en) 2015-04-29 2021-06-01 FioDesign Sonics, Inc. Separation using angled acoustic waves
WO2016187596A1 (en) 2015-05-20 2016-11-24 Flodesign Sonics, Inc. Acoustic manipulation of particles in standing wave fields
US10161926B2 (en) 2015-06-11 2018-12-25 Flodesign Sonics, Inc. Acoustic methods for separation of cells and pathogens
US9663756B1 (en) 2016-02-25 2017-05-30 Flodesign Sonics, Inc. Acoustic separation of cellular supporting materials from cultured cells
WO2017008066A1 (en) 2015-07-09 2017-01-12 Flodesign Sonics, Inc Non-planar and non-symmetrical piezolectric crystals and reflectors
US11459540B2 (en) 2015-07-28 2022-10-04 Flodesign Sonics, Inc. Expanded bed affinity selection
US11474085B2 (en) 2015-07-28 2022-10-18 Flodesign Sonics, Inc. Expanded bed affinity selection
US10710006B2 (en) 2016-04-25 2020-07-14 Flodesign Sonics, Inc. Piezoelectric transducer for generation of an acoustic standing wave
US11214789B2 (en) 2016-05-03 2022-01-04 Flodesign Sonics, Inc. Concentration and washing of particles with acoustics
CN114891635A (en) 2016-05-03 2022-08-12 弗洛设计声能学公司 Therapeutic cell washing, concentration and separation using acoustophoresis
US11085035B2 (en) 2016-05-03 2021-08-10 Flodesign Sonics, Inc. Therapeutic cell washing, concentration, and separation utilizing acoustophoresis
WO2018013668A1 (en) 2016-07-12 2018-01-18 Alexander Poltorak System and method for maintaining efficiency of a heat sink
KR20190127655A (en) 2016-10-19 2019-11-13 프로디자인 소닉스, 인크. Affinity cell extraction by acoustics
CN106363003B (en) * 2016-11-15 2018-10-23 深圳绿源轩电子技术有限公司 A kind of power circuit being effectively improved ultrasonic cleaning effect
FR3061836B1 (en) * 2017-01-17 2021-06-04 Gil Ching DEVICE AND METHOD FOR CLEANING AND / OR DECONTAMINATION OF FOOD BY HIGH FREQUENCY ACOUSTIC WAVES
US11031312B2 (en) 2017-07-17 2021-06-08 Fractal Heatsink Technologies, LLC Multi-fractal heatsink system and method
KR20220066413A (en) 2017-12-14 2022-05-24 프로디자인 소닉스, 인크. Acoustic transducer drive and controller
US10327736B1 (en) * 2018-04-17 2019-06-25 William L. Puskas Ultrasound transducer arrays and associated systems and methods
US20220250117A1 (en) * 2019-05-23 2022-08-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Sensors and methods for generating spatially encoded acoustic fields by sound-emitting apertures with spatially varying frequency and bandwidth
DE102021128380A1 (en) * 2021-10-29 2023-05-04 Endress+Hauser Flowtec Ag Ultrasonic sensor for an ultrasonic measuring device and ultrasonic measuring device
CN114204583B (en) * 2021-11-24 2023-12-05 华北电力大学 Device parameter design method for inhibiting intermediate frequency and high frequency oscillation of flexible direct current transmission

Family Cites Families (107)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US25433A (en) * 1859-09-13 Shingle-machine
US2585103A (en) * 1948-03-08 1952-02-12 Otis A Brown Apparatus for ultrasonic treatment of liquids
US2891176A (en) * 1955-07-13 1959-06-16 Branson Instr Compressional wave generating apparatus
USRE25433E (en) * 1956-08-27 1963-08-13 Electromechanical transducer system
US2985003A (en) * 1957-01-11 1961-05-23 Gen Motors Corp Sonic washer
US3066232A (en) * 1959-06-12 1962-11-27 Branson Instr Ultrasonic transducer
US3094314A (en) * 1960-08-02 1963-06-18 Detrex Chem Ind Sandwich type transducer and coupling
US3187207A (en) * 1960-08-08 1965-06-01 Giannini Controls Corp Transducers
US3140859A (en) * 1961-01-17 1964-07-14 Internat Ultrasonics Inc Electroacoustic sandwich transducers
US3152295A (en) * 1961-05-01 1964-10-06 Bendix Corp Pulsed tank circuit magneto-or electrostrictive device excitation
US3191913A (en) * 1961-05-22 1965-06-29 Hal C Mettler Ultrasonic unit
US3230403A (en) * 1961-07-14 1966-01-18 Bendix Corp Prestressed ceramic transducer
US3113761A (en) * 1961-07-26 1963-12-10 Ultrasonic Ind Inc Ultrasonic tank housing
US3218488A (en) * 1961-08-01 1965-11-16 Branson Instr Transducer
US3315102A (en) * 1963-01-14 1967-04-18 Electromation Components Corp Piezoelectric liquid cleaning device
US3293456A (en) * 1963-03-18 1966-12-20 Branson Instr Ultrasonic cleaning apparatus
US3318578A (en) * 1965-03-22 1967-05-09 Branson Instr Cleaning apparatus
US3319219A (en) * 1965-03-29 1967-05-09 Dynamics Corp Massa Div Electroacoustic transducer
US3371233A (en) * 1965-06-28 1968-02-27 Edward G. Cook Multifrequency ultrasonic cleaning equipment
US3328751A (en) * 1966-03-28 1967-06-27 Dynamics Corp Massa Div Electroacoustic transducer
US3535159A (en) * 1967-12-07 1970-10-20 Branson Instr Method and apparatus for applying ultrasonic energy to a workpiece
US3433462A (en) * 1968-01-19 1969-03-18 Crest Ultrasonics Corp Method and apparatus for resonating small piezoelectric crystals at low frequencies
SE329037B (en) * 1969-02-20 1970-09-28 Philips Nv
US3727112A (en) * 1969-08-29 1973-04-10 Surgical Design Corp Generator for producing ultrasonic energy
US3629726A (en) * 1969-08-29 1971-12-21 Surgical Design Corp Oscillator and oscillator control circuit
GB1331100A (en) * 1969-11-03 1973-09-19 Crest Ultrasonics Corp Transducer suitable for use with ultrasonic processing tanks
CA951012A (en) * 1970-04-27 1974-07-09 Gerald J.A. Hochmann Electromechanical transducer
US3648188A (en) * 1970-06-10 1972-03-07 Bendix Corp Transistor power amplifier
US3638087A (en) * 1970-08-17 1972-01-25 Bendix Corp Gated power supply for sonic cleaners
US3651352A (en) * 1970-12-10 1972-03-21 Branson Instr Oscillatory circuit for ultrasonic cleaning apparatus
US3690333A (en) * 1971-05-17 1972-09-12 Hans Kierner Machine for cleaning small parts
US3746897A (en) * 1971-07-28 1973-07-17 Ultrasonic Systems Ultrasonic multi-frequency system
US3735159A (en) * 1972-01-24 1973-05-22 E Murry Method and apparatus for translating ultrasonic energy
US3778758A (en) * 1972-09-25 1973-12-11 Us Navy Transducer
US3804329A (en) * 1973-07-27 1974-04-16 J Martner Ultrasonic generator and atomizer apparatus and method
GB1488252A (en) * 1973-12-15 1977-10-12 Kerry Ultrasonics Ultrasonic cleaning apparatus
US3893869A (en) * 1974-05-31 1975-07-08 Rca Corp Megasonic cleaning system
US4120699A (en) * 1974-11-07 1978-10-17 Alvin B. Kennedy, Jr. Method for acoustical cleaning
JPS5635260Y2 (en) * 1975-01-23 1981-08-19
US3975650A (en) * 1975-01-30 1976-08-17 Payne Stephen C Ultrasonic generator drive circuit
GB1537058A (en) * 1975-05-20 1978-12-29 Matsushita Electric Ind Co Ltd Ultrasonic generators
GB1571304A (en) * 1976-02-24 1980-07-16 Lucas Industries Ltd Drive circuit for a piezo electric crystal
US4069444A (en) * 1976-06-01 1978-01-17 Westinghouse Electric Corporation Ultrasonic power generator
US4081706A (en) * 1976-10-21 1978-03-28 Delta Sonics, Inc. Oscillatory circuit for an ultrasonic cleaning device with feedback from the piezoelectric transducer
DE2721225C2 (en) * 1977-05-11 1981-10-29 Siemens AG, 1000 Berlin und 8000 München Circuit arrangement for frequency self-control of an ultrasonic transmitter transducer
FR2391001A1 (en) * 1977-05-18 1978-12-15 Satelec Soc ULTRA-SOUND GENERATOR
US4118649A (en) * 1977-05-25 1978-10-03 Rca Corporation Transducer assembly for megasonic cleaning
US4141608A (en) * 1977-11-10 1979-02-27 L & R Manufacturing Company Circuitry for driving a non-linear transducer for ultrasonic cleaning
FR2446638A1 (en) * 1979-01-18 1980-08-14 Aussenac Jack SOUND-ACTINIC DEVICE FOR CLEANING AND AEPING
JPS5610792A (en) * 1979-07-06 1981-02-03 Taga Denki Kk Method and circuit for driving ultrasonic-wave converter
CA1167916A (en) * 1979-10-10 1984-05-22 Robert E. White Converter circuit employing pulse-width modulation
US4326553A (en) * 1980-08-28 1982-04-27 Rca Corporation Megasonic jet cleaner apparatus
US5834871A (en) * 1996-08-05 1998-11-10 Puskas; William L. Apparatus and methods for cleaning and/or processing delicate parts
FI61735C (en) * 1981-03-16 1982-09-10 Valmet Oy FOERFARANDE I SAMBAND MED PAPPERSTILLVERKNING
US4418297A (en) * 1981-03-16 1983-11-29 L & R Manufacturing Company Oscillatory resonant transducer driver circuit
US4431975A (en) * 1981-04-16 1984-02-14 Ultrasonic Power Corporation Oscillator circuit for ultrasonic cleaning
GB2097890B (en) * 1981-05-01 1985-06-12 Boulton Ltd William Ultrasonic cleaning
US4409999A (en) * 1981-08-07 1983-10-18 Pedziwiatr Edward A Automatic ultrasonic cleaning apparatus
JPS5850898A (en) * 1981-09-21 1983-03-25 Nec Corp Bolt-clamped langevin oscillator
US4439847A (en) * 1981-12-21 1984-03-27 The Stoneleigh Trust High efficiency broadband directional sonar transducer
US4398925A (en) * 1982-01-21 1983-08-16 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Acoustic bubble removal method
DE3314609A1 (en) * 1983-04-22 1984-10-25 Siemens AG, 1000 Berlin und 8000 München METHOD FOR OPERATING AN ULTRASONIC VIBRATOR FOR LIQUID SPRAYING
FR2570916B1 (en) * 1983-06-23 1988-04-15 France Etat Armement ELECTRO-ACOUSTIC TRANSDUCER AND METHOD FOR TRANSMITTING OR RECEIVING ACOUSTIC WAVES IN SEVERAL BANDWIDTHS
US4527901A (en) * 1983-11-21 1985-07-09 Ultrasonic Power Corporation Ultrasonic cleaning tank
US4554477A (en) * 1983-11-25 1985-11-19 Ratcliff Henry K Drive circuit for a plurality of ultrasonic generators using auto follow and frequency sweep
GB2161037A (en) * 1984-06-29 1986-01-02 Philips Electronic Associated Inverter circuit arrangement
US4633119A (en) * 1984-07-02 1986-12-30 Gould Inc. Broadband multi-resonant longitudinal vibrator transducer
US4543130A (en) * 1984-08-28 1985-09-24 Rca Corporation Megasonic cleaning apparatus and method
US4559826A (en) * 1984-09-14 1985-12-24 Tab Leasing Precision source of acoustic radiation
GB2170663B (en) * 1985-02-02 1989-06-14 Brian Ernest Attwood Harmonic-resonant power supply
US4864547A (en) * 1986-05-20 1989-09-05 Crestek, Inc. Regulated ultrasonic generator
JPS6276399A (en) * 1985-09-28 1987-04-08 Sadayuki Ueha High-frequency langevin type vibrator
US5119840A (en) * 1986-04-07 1992-06-09 Kaijo Kenki Co., Ltd. Ultrasonic oscillating device and ultrasonic washing apparatus using the same
US4736130A (en) * 1987-01-09 1988-04-05 Puskas William L Multiparameter generator for ultrasonic transducers
US4743789A (en) * 1987-01-12 1988-05-10 Puskas William L Variable frequency drive circuit
US4788992A (en) * 1987-04-28 1988-12-06 Lewis Corporation Ultrasonic strip cleaning apparatus
US4804007A (en) * 1987-04-29 1989-02-14 Verteq, Inc. Cleaning apparatus
US4869278A (en) * 1987-04-29 1989-09-26 Bran Mario E Megasonic cleaning apparatus
US4998549A (en) * 1987-04-29 1991-03-12 Verteq, Inc. Megasonic cleaning apparatus
US5037481B1 (en) * 1987-04-29 1993-05-11 Verteq, Inc. Megasonic cleaning method
JPS6411253A (en) * 1987-06-23 1989-01-13 Polaroid Corp Exposer for image former
US4836684A (en) * 1988-02-18 1989-06-06 Ultrasonic Power Corporation Ultrasonic cleaning apparatus with phase diversifier
US5305737A (en) * 1988-03-30 1994-04-26 Arjo Inc. Ultrasonic treatment system
US4854337A (en) * 1988-05-24 1989-08-08 Eastman Kodak Company Apparatus for treating wafers utilizing megasonic energy
US5037208A (en) * 1989-04-06 1991-08-06 Branson Ultrasonics Corporation Immersible transducer assembly
US4979994A (en) * 1989-04-06 1990-12-25 Branson Ultrasonics Corporation Method and apparatus for cleaning by ultrasonic wave energy
US5109174A (en) * 1989-11-22 1992-04-28 Mdt Corporation Ultrasonic cleaner
US5090432A (en) * 1990-10-16 1992-02-25 Verteq, Inc. Single wafer megasonic semiconductor wafer processing system
US5148823A (en) * 1990-10-16 1992-09-22 Verteg, Inc. Single chamber megasonic energy cleaner
US5143103A (en) * 1991-01-04 1992-09-01 International Business Machines Corporation Apparatus for cleaning and drying workpieces
US5496411A (en) * 1991-06-14 1996-03-05 Halcro Nominees Pty. Ltd. Ultrasonic vibration generator and use of same for cleaning objects in a volume of liquid
US5218980A (en) * 1991-10-10 1993-06-15 Evans David H Ultrasonic dishwasher system
US5201958A (en) * 1991-11-12 1993-04-13 Electronic Controls Design, Inc. Closed-loop dual-cycle printed circuit board cleaning apparatus and method
US5247954A (en) * 1991-11-12 1993-09-28 Submicron Systems, Inc. Megasonic cleaning system
US5276376A (en) * 1992-06-09 1994-01-04 Ultrasonic Power Corporation Variable frequency ultrasonic generator with constant power output
US5365960A (en) * 1993-04-05 1994-11-22 Verteq, Inc. Megasonic transducer assembly
US5355048A (en) * 1993-07-21 1994-10-11 Fsi International, Inc. Megasonic transducer for cleaning substrate surfaces
JPH07163954A (en) 1993-12-13 1995-06-27 Yoshihide Shibano Cleaning method and cleaner
US5534076A (en) * 1994-10-03 1996-07-09 Verteg, Inc. Megasonic cleaning system
US5998908A (en) * 1996-05-09 1999-12-07 Crest Ultrasonics Corp. Transducer assembly having ceramic structure
US6822372B2 (en) * 1999-08-09 2004-11-23 William L. Puskas Apparatus, circuitry and methods for cleaning and/or processing with sound waves
WO1998027529A1 (en) * 1996-12-16 1998-06-25 Mannesmann Ag Process for transmitting route information which concerns a route of a vehicle in a road network between a traffic information centre and a terminal in a vehicle, traffic information centre and terminal
US6394111B1 (en) 1997-06-11 2002-05-28 Ethicon, Inc. Detection of cleanliness of a medical device during a washing process
US6150753A (en) * 1997-12-15 2000-11-21 Cae Blackstone Ultrasonic transducer assembly having a cobalt-base alloy housing
JP3180086B2 (en) 1998-08-31 2001-06-25 株式会社シーメディア Mobile communication device, information transmission system and method, non-contact IC media usable in mobile communication device
US6333703B1 (en) * 1998-11-24 2001-12-25 International Business Machines Corporation Automated traffic mapping using sampling and analysis
US6295873B1 (en) 1999-07-22 2001-10-02 The United States Of America As Represented By The United States Department Of Energy Ultrasonic sensor and method of use

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US20020171331A1 (en) 2002-11-21
US6181051B1 (en) 2001-01-30
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US6002195A (en) 1999-12-14
US6433460B1 (en) 2002-08-13
WO1998006143A1 (en) 1998-02-12
US6914364B2 (en) 2005-07-05
US5834871A (en) 1998-11-10
US6946773B2 (en) 2005-09-20
US20040182414A1 (en) 2004-09-23
AU3962197A (en) 1998-02-25

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