WO2002062202A3 - Microprotrusion array and methods of making a microprotrusion - Google Patents

Microprotrusion array and methods of making a microprotrusion Download PDF

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Publication number
WO2002062202A3
WO2002062202A3 PCT/US2002/003206 US0203206W WO02062202A3 WO 2002062202 A3 WO2002062202 A3 WO 2002062202A3 US 0203206 W US0203206 W US 0203206W WO 02062202 A3 WO02062202 A3 WO 02062202A3
Authority
WO
WIPO (PCT)
Prior art keywords
microprotrusion
array
making
methods
wet isotropic
Prior art date
Application number
PCT/US2002/003206
Other languages
French (fr)
Other versions
WO2002062202A2 (en
Inventor
John D Evans
Chris Keller
Original Assignee
Becton Dickinson Co
John D Evans
Chris Keller
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Becton Dickinson Co, John D Evans, Chris Keller filed Critical Becton Dickinson Co
Priority to JP2002562213A priority Critical patent/JP2004524172A/en
Priority to AU2002250011A priority patent/AU2002250011A1/en
Priority to US10/467,285 priority patent/US20040060902A1/en
Priority to EP02718901A priority patent/EP1364396A4/en
Publication of WO2002062202A2 publication Critical patent/WO2002062202A2/en
Publication of WO2002062202A3 publication Critical patent/WO2002062202A3/en

Links

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/145Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/14507Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood
    • A61B5/1451Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood for interstitial fluid
    • A61B5/14514Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood for interstitial fluid using means for aiding extraction of interstitial fluid, e.g. microneedles or suction
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/15Devices for taking samples of blood
    • A61B5/150007Details
    • A61B5/150015Source of blood
    • A61B5/150022Source of blood for capillary blood or interstitial fluid
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/15Devices for taking samples of blood
    • A61B5/150007Details
    • A61B5/150206Construction or design features not otherwise provided for; manufacturing or production; packages; sterilisation of piercing element, piercing device or sampling device
    • A61B5/150274Manufacture or production processes or steps for blood sampling devices
    • A61B5/150282Manufacture or production processes or steps for blood sampling devices for piercing elements, e.g. blade, lancet, canula, needle
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/15Devices for taking samples of blood
    • A61B5/150977Arrays of piercing elements for simultaneous piercing
    • A61B5/150984Microneedles or microblades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00111Tips, pillars, i.e. raised structures
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/003Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles having a lumen
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0053Methods for producing microneedles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/05Microfluidics
    • B81B2201/055Microneedles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/01Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128Processes for removing material
    • B81C2201/013Etching
    • B81C2201/0133Wet etching

Abstract

A microprotrusion array is formed from a silicon wafer by a plurality of sequential plasma and wet isotropic and anisotropic etching steps. The resulting microprotrusions (14) have sharpened tips (18) or cutting edges formed by wet isotropic etching, wherein each microprotrusion has a substantially pyramid shape with each side (16) having a concave surface. The tip of each microprotrusion has a substantially flat top surface (20) extending parallel to base (12).
PCT/US2002/003206 2001-02-05 2002-02-05 Microprotrusion array and methods of making a microprotrusion WO2002062202A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002562213A JP2004524172A (en) 2001-02-05 2002-02-05 Micro projection array and method of manufacturing micro projection
AU2002250011A AU2002250011A1 (en) 2001-02-05 2002-02-05 Microprotrusion array and methods of making a microprotrusion
US10/467,285 US20040060902A1 (en) 2002-02-05 2002-02-05 Microprotrusion array and methods of making a microprotrusion
EP02718901A EP1364396A4 (en) 2001-02-05 2002-02-05 Microprotrusion array and methods of making a microprotrusion

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26643101P 2001-02-05 2001-02-05
US60/266,431 2001-02-05

Publications (2)

Publication Number Publication Date
WO2002062202A2 WO2002062202A2 (en) 2002-08-15
WO2002062202A3 true WO2002062202A3 (en) 2002-10-10

Family

ID=23014567

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/003206 WO2002062202A2 (en) 2001-02-05 2002-02-05 Microprotrusion array and methods of making a microprotrusion

Country Status (4)

Country Link
EP (1) EP1364396A4 (en)
JP (1) JP2004524172A (en)
AU (1) AU2002250011A1 (en)
WO (1) WO2002062202A2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8911749B2 (en) 2007-04-16 2014-12-16 Corium International, Inc. Vaccine delivery via microneedle arrays
US9114238B2 (en) 2007-04-16 2015-08-25 Corium International, Inc. Solvent-cast microprotrusion arrays containing active ingredient

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US6663820B2 (en) * 2001-03-14 2003-12-16 The Procter & Gamble Company Method of manufacturing microneedle structures using soft lithography and photolithography
CN1298292C (en) 2002-03-11 2007-02-07 贝克顿迪肯森公司 System and method for the manufacture of surgical blades
US7578954B2 (en) * 2003-02-24 2009-08-25 Corium International, Inc. Method for manufacturing microstructures having multiple microelements with through-holes
WO2005027728A2 (en) 2003-09-17 2005-03-31 Becton, Dickinson And Company Method for creating trenches in silicon wafers using a router
EP1713533A4 (en) * 2003-11-21 2008-01-23 Univ California Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles
US7183215B2 (en) * 2004-07-21 2007-02-27 Hewlett-Packard Development Company, L.P. Etching with electrostatically attracted ions
CA2594291C (en) * 2004-12-28 2012-03-06 Nabtesco Corporation Skin needle manufacturing apparatus and skin needle manufacturing method
WO2006075716A1 (en) * 2005-01-14 2006-07-20 Fujikura Ltd. Drug delivery instrument and method of producing the same
US8277409B2 (en) * 2005-12-05 2012-10-02 Becton, Dickinson And Company Cutting element for a retracting needle syringe
DE102006028781A1 (en) * 2006-06-23 2007-12-27 Robert Bosch Gmbh Process for making porous microneedles and their use
DE102006040642A1 (en) 2006-08-30 2008-03-13 Robert Bosch Gmbh Microneedles for placement in the skin for transdermal application of pharmaceuticals
JP5410057B2 (en) * 2008-08-06 2014-02-05 Sppテクノロジーズ株式会社 Etching method of silicon substrate
ES2719595T3 (en) 2010-05-04 2019-07-11 Corium Int Inc Method and device for transdermal administration of parathyroid hormone using a microprojection matrix
JP5845808B2 (en) * 2011-10-28 2016-01-20 凸版印刷株式会社 Microneedle device and manufacturing method thereof
CA2896188C (en) 2012-12-21 2021-02-23 Corium International, Inc. Microarray for delivery of therapeutic agent and methods of use
AU2014249471B2 (en) 2013-03-12 2019-01-24 Corium Pharma Solutions, Inc. Microprojection applicators
CN105228522B (en) 2013-03-14 2018-06-26 萨诺智能公司 For the microsensor on the human body of biological monitoring
US10820860B2 (en) 2013-03-14 2020-11-03 One Drop Biosensor Technologies, Llc On-body microsensor for biomonitoring
JP2016512754A (en) 2013-03-15 2016-05-09 コリウム インターナショナル, インコーポレイテッド Microarray, method of use and manufacturing for delivery of therapeutic agents
MX2015012933A (en) 2013-03-15 2016-09-19 Corium Int Inc Microarray for delivery of therapeutic agent and methods of use.
ES2939317T3 (en) 2013-03-15 2023-04-20 Corium Pharma Solutions Inc Multi-impact micro-spray applicators
CA2903763C (en) 2013-03-15 2021-11-16 Corium International, Inc. Microarray with polymer-free microstructures, methods of making, and methods of use
US20150257687A1 (en) 2014-03-13 2015-09-17 Sano Intelligence, Inc. System for monitoring body chemistry
US10595754B2 (en) 2014-03-13 2020-03-24 Sano Intelligence, Inc. System for monitoring body chemistry
US10624843B2 (en) 2014-09-04 2020-04-21 Corium, Inc. Microstructure array, methods of making, and methods of use
JP5967595B2 (en) * 2014-09-08 2016-08-10 株式会社かいわ Puncture device
WO2017004067A1 (en) 2015-06-29 2017-01-05 Corium International, Inc. Microarray for delivery of therapeutic agent, methods of use, and methods of making
JP6608336B2 (en) * 2016-06-06 2019-11-20 三島光産株式会社 Microneedle array
CN110076528A (en) * 2019-05-13 2019-08-02 大连理工大学 A kind of planar metal microneedle array and preparation method thereof
CN111675190A (en) * 2020-06-18 2020-09-18 苏州恒之清生物科技有限公司 Preparation method of miniature solid silicon needle
USD988882S1 (en) 2021-04-21 2023-06-13 Informed Data Systems Inc. Sensor assembly

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US5726073A (en) * 1993-06-01 1998-03-10 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5779514A (en) * 1996-02-13 1998-07-14 National Science Council Technique to fabricate chimney-shaped emitters for field-emission devices
US6056887A (en) * 1997-06-05 2000-05-02 C.S.E.M. - Centre Suisse D'electronique Et De Microtechniques S.A. Process for fabricating a feeler member for a micromechanical probe, in particular for an atomic force microscope
US6165374A (en) * 1992-05-15 2000-12-26 Micron Technology, Inc. Method of forming an array of emitter tips
US6334856B1 (en) * 1998-06-10 2002-01-01 Georgia Tech Research Corporation Microneedle devices and methods of manufacture and use thereof
US6406638B1 (en) * 2000-01-06 2002-06-18 The Regents Of The University Of California Method of forming vertical, hollow needles within a semiconductor substrate, and needles formed thereby

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Patent Citations (6)

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US6165374A (en) * 1992-05-15 2000-12-26 Micron Technology, Inc. Method of forming an array of emitter tips
US5726073A (en) * 1993-06-01 1998-03-10 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
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US6406638B1 (en) * 2000-01-06 2002-06-18 The Regents Of The University Of California Method of forming vertical, hollow needles within a semiconductor substrate, and needles formed thereby

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8911749B2 (en) 2007-04-16 2014-12-16 Corium International, Inc. Vaccine delivery via microneedle arrays
US9114238B2 (en) 2007-04-16 2015-08-25 Corium International, Inc. Solvent-cast microprotrusion arrays containing active ingredient
US9452280B2 (en) 2007-04-16 2016-09-27 Corium International, Inc. Solvent-cast microprotrusion arrays containing active ingredient
US9498524B2 (en) 2007-04-16 2016-11-22 Corium International, Inc. Method of vaccine delivery via microneedle arrays

Also Published As

Publication number Publication date
EP1364396A2 (en) 2003-11-26
JP2004524172A (en) 2004-08-12
WO2002062202A2 (en) 2002-08-15
EP1364396A4 (en) 2005-08-31
AU2002250011A1 (en) 2002-08-19

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